RCA clean
The RCA clean is a standard set of wafer cleaning steps which need to be performed before high-temperature processing steps (oxidation, diffusion, CVD) of silicon wafers in semiconductor manufacturing.
RCA clean - Wikipedia Jump to content From Wikipedia, the free encyclopedia Silicon wafer cleaning procedure in semiconductor manufacturing The RCA clean is a standard set of wafer cleaning steps which need to be performed before high-temperature processing steps ( oxidation , diffusion , CVD ) of silicon wafers in semiconductor manufacturing. Werner Kern developed the basic procedure in 1965 while working for RCA, the Radio Corporation of America . [ 1 ] [ 2 ] [ 3 ] It involves the following chemical processes performed in sequence: Removal of the organic contaminants (organic clean + particl
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