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Photolithography

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In integrated circuit manufacturing, photolithography or optical lithography is a general term used for techniques that use light to produce minutely patterned thin films of suitable materials over a substrate, such as a silicon wafer, to protect selected areas of it during subsequent etching, deposition, or implantation operations. Typically, ultraviolet light is used to transfer a geometric design from an optical mask to a light-sensitive chemical (photoresist) coated on the substrate. The photoresist either breaks down or hardens where it is exposed to light. The patterned film is then created by removing the softer parts of the coating with appropriate solvents, also known in this case as developers.

Photolithography - Wikipedia Jump to content From Wikipedia, the free encyclopedia Process in microfabrication This article is about semiconductor manufacturing. For printing on paper, see lithography . For similar processes for metals, see photochemical machining . Silicon wafer that has undergone photolithography Photolithography (also known as optical lithography ) is a process that involves using light to transfer a pattern onto a photoresist layer deposited on a sample, typically a silicon wafer . It is used in the manufacturing of integrated circuits . The process begins with a photosens

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