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Deep_reactive-ion_etching
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Deep reactive-ion etching - Wikipedia Jump to content From Wikipedia, the free encyclopedia Highly anisotropic etch process This article needs additional citations for verification . Please help improve this article by adding citations to reliable sources . Unsourced material may be challenged and removed. Find sources:   "Deep reactive-ion etching"  –  news   · newspapers   · books   · scholar   · JSTOR ( December 2009 ) ( Learn how and when to remove this message ) Deep reactive-ion etching ( DRIE ) is a special subclass of reactive-ion etching (RIE). It en
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