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Precision ultrasound sensing on a chip | Nature Communications

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Thank you for visiting nature.com. You are using a browser version with limited support for CSS. To obtain the best experience, we recommend you use a more up to date browser (or turn off compatibility mode in Internet Explorer). In the meantime, to ensure continued support, we are displaying the site without styles and JavaScript. Advertisement Nature Communications volume 10, Article number: 132 (2019) Cite this article 19k Accesses 103 Citations 74 Altmetric Metrics details Ultrasound sensors have wide applications across science and technology. However, improved sensitivity is required for both miniaturisation and increased spatial resolution. Here, we introduce cavity optomechanical ultrasound sensing, where dual optical and mechanical resonances enhance the ultrasound signal. We achieve noise equivalent pressures of 8–300 μPa Hz−1/2 at kilohertz to megahertz frequencies in a microscale silicon-chip-based sensor with >120 dB dynamic range. The

Download PDF Subjects Imaging and sensing Micro-optics Optomechanics Abstract Ultrasound sensors have wide applications across science and technology. However, improved sensitivity is required for both miniaturisation and increased spatial resolution. Here, we introduce cavity optomechanical ultrasound sensing, where dual optical and mechanical resonances enhance the ultrasound signal. We achieve noise equivalent pressures of 8–300 μPa H z −1/2 at kilohertz to megahertz frequencies in a microscale silicon-chip-based sensor with >120 dB dynamic range. The sensitivity far exceeds similar sensors

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